Scalable integration of nano-, and microfluidics with hybrid two-photon lithography

HIGHLIGHTS

• who: Oliver Vanderpoorten from the (UNIVERSITY) have published the article: Scalable integration of nano-, and microfluidics with hybrid two-photon lithography, in the Journal: (JOURNAL)
• what: The authors demonstrate a hybrid two photon nanolithography approach interfaced with conventional mask whole-wafer UV-photolithography to generate master wafers for the fabrication of integrated micro and nanofluidic devices. Using this approach the authors demonstrate the fabrication of molds from SU-8 photoresist with nanofluidic features down to 230 nm lateral width and channel heights from micron to sub-100 nm. Combining UV lithography with two-photon DLW . . .
  

   

  

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