Selective-area ald for positively and negatively charged layers into the ion-beam track-etched conical pores in polyethylene terephthalate

HIGHLIGHTS

• who: Hua Li and colleagues from the Beijing Institute of Graphic Communication, Laboratory of Plasma Physic and Materials, Beijing, China Peking University, State Key Laboratory of Nuclear Physics and Technology, School of Physics, Beijing, China have published the article: Selective-area ALD for positively and negatively charged layers into the ion-beam track-etched conical pores in polyethylene terephthalate, in the Journal: (JOURNAL)
• what: In this paper, the selective area ALD positive and negative layers on silicon surface and in the conical pores of ion beam track-etched PET were preformed.
• how: This . . .
  

   

  

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