Self-calibration of a large-scale variable-line-spacing grating for an absolute optical encoder by differencing spatially shifted phase maps from a fizeau interferometer

HIGHLIGHTS

• who: Xin Xiong and colleagues from the Department of Finemechanics, Tohoku University, Sendai, Japan have published the paper: Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer, in the Journal: Sensors 2022, 22, x FOR PEER REVIEW of /2022/
• what: In this paper, a new method inspired by the conventional pseudo-lateral-shearing method is proposed to evaluate the pitch variations of a large-scale planar VLS grating.
• how: A new method based on the interferometric pseudo . . .
  

   

  

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