Sensors

HIGHLIGHTS

  • who: ME and colleagues from the Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma have published the article: sensors, in the Journal: (JOURNAL)
  • what: This work proposes the design of a MEMS gyroscope amenable to surface micromachining manufacturing and MEMS-IC monolithic integration. The present project aimed at proposing an electro-mechanical system capable of implementing both complex movements and detection of small forces.
  • how: The device was tested for actuation at 0 and 30 V. Figures 5 and 6 show the behavior of the generated overlap angle as the . . .

     

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