HIGHLIGHTS
- who: Joachim Frühauf and collaborators from the SiMETRICS GmbH, Am Südhang, Limbach-Oberfrohna, Germany have published the paper: Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration, in the Journal: Sensors 2022, 22, 6253. of /2022/
- what: The paper discusses comprehensively the properties of concrete silicon chips with cantilevers to underpin its applicability in industrial metrology. Measurement with the autofocus sensor With the autofocus sensor (AF 16 with stage Hyperion of OPM, Ettlingen, Germany), the authors have measured the zero-load bending z0E at the end mark E from a profile in front of . . .
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