HIGHLIGHTS
- who: Ogorodnikov Alexey I. and collaborators from the Ural State Technical University, Mira Street, Ekaterinburg, Russia have published the article: Simulation of defect zones in scribed silicon wafers, in the Journal: (JOURNAL)
- what: The paper presents the results of computer simulation of silicon wafers under scribe loading conditions. The aim of this study was to simulate scribing of silicon wafer and to analyse its behavior under the loading condition. c 2010 IOP Publishing Ltd
- how: The model consists of silicon plate glued to flexible film and diamond indenter with a tip radius about . . .
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