Spurious phenomena occuring during current measurement on ultra-thin dielectric layers: from electro-thermal effects to surface damage

HIGHLIGHTS

  • who: Antonin Grandfond and collaborators from the Institut , Villeurbanne , France have published the paper: Spurious phenomena occuring during current measurement on ultra-thin dielectric layers: From electro-thermal effects to surface damage, in the Journal: (JOURNAL) of 17/09/2013
  • what: In this paper the conduction properties of dielectric ultra-thin layers are studied using atomic force microscopy. The authors propose that these results may be explained by an electro-thermal effect due to the large dissipated energy maybe combined with the oxidation of the substrate. The authors propose a theory that allows a better . . .

     

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