Structure, oxygen content and electric properties of titanium nitride electrodes in tinx/la:hfo2/tinx stacks grown by peald on sio2/si

HIGHLIGHTS

  • who: Elena I. Suvorova and collaborators from the Moscow, Russia have published the article: Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si, in the Journal: Nanomaterials 2022, 12, 3608. of /2022/
  • what: This work reports experimental results of the quantitative determination of oxygen and band gap measurement in the electrodes in planar top/La:HfO2 bottom MIM obtained by plasma enhanced atomic layer deposition Methodological aspects of extracting structural and chemical information from_(scanning) transmission electron microscopy imaging (bright field and . . .

     

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