HIGHLIGHTS
- who: Elena I. Suvorova and collaborators from the Moscow, Russia have published the article: Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si, in the Journal: Nanomaterials 2022, 12, 3608. of /2022/
- what: This work reports experimental results of the quantitative determination of oxygen and band gap measurement in the electrodes in planar top/La:HfO2 bottom MIM obtained by plasma enhanced atomic layer deposition Methodological aspects of extracting structural and chemical information from_(scanning) transmission electron microscopy imaging (bright field and . . .
If you want to have access to all the content you need to log in!
Thanks :)
If you don't have an account, you can create one here.