Study of the performance enhancement of sc-doped aln super high frequency cross-sectional lamé mode resonators

HIGHLIGHTS

• who: Meruyert Assylbekova and colleagues from the SMART Center, Northeastern University, Boston, MA, USA have published the research work: Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamu00e9 Mode Resonators, in the Journal: Micromachines 2023, 14, 515. of /2023/
• what: The authors explore the use of substitutional doping of Al in AlN with Sc to enhance the kt 2 values of SHF CLMRs. The authors show that by doping AlN with moderate Sc concretion (28%) and maintaining a relatively high Q factor, almost a 4u00d7 improvement in Figure of . . .
  

   

  

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