Substrate engineering of inductors on soi for improvement of q-factor and application in lna

HIGHLIGHTS

  • who: ARUN BHASKAR and collaborators from the University of Lille, CNRS, Centrale Lille, UniversitĂ© Polytechnique Hauts-de-France, YncrĂ©a Hauts-de-France, UMR, IEMN, Lille, France have published the research work: Substrate Engineering of Inductors on SOI for Improvement of Q-Factor and Application in LNA, in the Journal: (JOURNAL)
  • what: In this context the authors report a substrate engineering method that enables improvement of quality factors of already fabricated inductors on SOI. While this approach has been shown to work efficiently, some of the drawbacks are higher number of steps in fabrication, possible . . .

     

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