Suppression of particle formation by gas-phase pre-reactions in (100) movpe-grown β-ga2o3 films for vertical device application

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  • who: Ta-Shun Chou et al. from the u00fc chtung (IKZ), Max-Born-Str2, Berlin, Germany have published the article: Suppression of particle formation by gas-phase pre-reactions in (100) MOVPE-grown u03b2-Ga2O3 films for vertical device application, in the Journal: (JOURNAL)
  • what: This work investigated the metalorganic vapor-phase epitaxy (MOVPE) of_(100) b-Ga2O3 films with the aim of meeting the requirements to act as drift layers for high-power electronic devices. The authors report that a moveable showerhead can provide a broader growth window for the stable formation of the . . .

     

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