Temporal evolution of plasma parameters in a pulse-modulated capacitively coupled ar/o2 mixture discharge

HIGHLIGHTS

  • who: Ar/O and colleagues from the Physics Laboratory, Department of Physics, COMSATS University, Islamabad, Pakistan have published the paper: Temporal evolution of plasma parameters in a pulse-modulated capacitively coupled Ar/O2 mixture discharge, in the Journal: (JOURNAL)
  • what: The experiment was carried out by generating the Ar and Ar/O2 mixture plasma in an indigenously developed stainless steel chamber with a parallel plate configuration. In the present paper, the temporal evolution of the EEPF is also studied at different pressures and O2 content in the discharge.

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