HIGHLIGHTS
- who: Haibo Gao and collaborators from the InstitutNankai University Weijin Road, #, Nankai District, Tianjin, People's Republic of China have published the research work: The correlation of material properties and deposition condition of ZnON thin films, in the Journal: (JOURNAL) of 21/02/2017
- what: The authors report a systematic study of ZnON properties and their correlation to the deposition conditions in a reactive sputtering process using a metallic Zn target in a gas mixture of Ar N2 and O2. The study was focused on the O2 /N2 flow rate ratio below 10%. Below the . . .
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