The effect of nitridation on sputtering aln on composited patterned sapphire substrate

HIGHLIGHTS

  • who: Yi Zhang and colleagues from the Institute of Optical Engineering, College of Science, Zhejiang University of Technology, No288, Liuhe Road, Hangzhou, China have published the paper: The Effect of Nitridation on Sputtering AlN on Composited Patterned Sapphire Substrate, in the Journal: Materials 2023, 16, 1104. of /2023/
  • what: The authors report on the epitaxial growth of on SiO2 -covered cone-shaped surfaces (PSS). The authors demonstrate a particular case where a low critical alternating current (AC) power is just able to break SiO2 covalent bonds enabling the growth of on the sides of the . . .

     

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