The effect of reactive sputtering on the microstructure of parylene-c

HIGHLIGHTS

  • who: Akeem Raji and collaborators from the Department of Creative Convergence Engineering, Hanbat National University, Dongseo-daero, Calgary, AB T N , Canada have published the article: The Effect of Reactive Sputtering on the Microstructure of Parylene-C, in the Journal: Materials 2022, 15, 5203. of /2022/
  • what: In this study the effect of sputtering on the microstructure of parylene-C was investigated in an aluminum nitride (AlN)-rich plasma environment.
  • how: Based on the experimental data the results showed that the crystallinity of parylene-C/AlN bilayers was increased after 30 min of . . .

     

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