HIGHLIGHTS
- who: Xiao Zuo et al. from the LaboratoryChina , University of have published the research: The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge, in the Journal: (JOURNAL) of 29/01/2018
- what: The authors focus the effects of superimposed DC current on HiPIMS discharge behaviors from target and substrate current waveforms characterization.
SUMMARY
Various methods have been attempted to improve deposition rate and discharge stability, such as magnetic_field configuration, hybrid secondary plasma source, and pulse waveform modulation. Decreasing the magnetic_field magnitude is an effective way to . . .
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