Tunable electrical properties of ti-b-n thin films sputter-deposited by the reactive gas pulsing process

HIGHLIGHTS

• who: Charalampos Sakkas and collaborators from the Institut FEMTO-ST, UMR, CNRS, ENSMM, UnivBourgogne Franche-Comtu00e9, B, des Montboucons, Besancon, France have published the article: Tunable Electrical Properties of Ti-B-N Thin Films Sputter-Deposited by the Reactive Gas Pulsing Process, in the Journal: Coatings 2022, 12, 1711. of /2022/
• what: Because BN is an insulating material and assuming a nanocomposite structure of Ti-B-N films, the motivation of this study is to understand how the electrical conductivity of Ti-B-N films can be tuned vs. light element concentration and to identify . . .
  

   

  

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