Ultracompact single-layer optical mems accelerometer based on evanescent coupling through silicon nanowaveguides

HIGHLIGHTS

• who: Chenguang Xin from the SchoolNorth University have published the paper: Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides, in the Journal: Scientific Reports Scientific Reports
• what: In this paper, a novel optical MEMS accelerometer with optical sensitivity of 32.83%/u00b5m within 1.68 g has been presented.
• how: A comparison between simulated results and the theoretical results is shown in Fig 3a and b respectively with D of 420 nm H of 100 nm of 1550 nm and neff calculated to be of 0.06155.
 



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