Update on x-ray microcalorimeter arrays based on thermal mkids (tkids)

HIGHLIGHTS

• What: The authors report progress the development of kinetic inductance detector (TKID) where each is an independent pixel. The aim of the research is to develop an x-ray detector technology that has moderate energy resolution, ~ 5 eV, over the 0.2-10 keV range with quantum efficiency ≥ 90% over the same range, but that can be scaled and multiplexed to achieve arrays possessing tens of kilo-pixels with ≥ 75% fill factor. The authors then fabricate and test devices with feature dimensions that vary around the estimate values, subject to fabrication constraints (e_g maximum Ta thickness the . . .
  

   

  

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