Viscoelastic properties measurements of thin polymer films from reflow of nanoimprinted patterns

HIGHLIGHTS

• who: Etienne Rognin and colleagues from the CEA-LETI-Minatec Campus, Rue des Martyrs, Grenoble , France have published the paper: Viscoelastic properties measurements of thin polymer films from reflow of nanoimprinted patterns, in the Journal: (JOURNAL) of 15/Dec/2011
• what: In this approach, attention is given to the time evolution of the fundamental spatial frequency of the shape, and viscoelastic properties are determined from the measured relaxation time. The authors focus the efforts on the accurate spatial determination of the film surface, rather than on its temporal evolution, and the authors extend the method . . .
  

   

  

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