Beyond 5 ghz excitation of a zno-based high-overtone bulk acoustic resonator on sic substrate

HIGHLIGHTS

• who: Padmalochan Panda from the Indian Institute have published the paper: Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate, in the Journal: Scientific Reports Scientific Reports

SUMMARY

A 650 ± 20 nm thick ZnO piezoelectric film was grown on the Pt/Ti-coated Si and SiC substrate using the RF sputtering method. The structural properties of the synthesized ZnO film on the Pt/Ti coated oxidized Si and SiC substrates were investigated using high-resolution X-ray diffraction (HRXRD, M/s. ZnO layers deposited on Pt . . .

 



If you want to have access to all the content you need to log in!

Thanks :)

Username or Email

Password

Remember me

Lost your password?

If you don't have an account, you can create one here.