Maskless microscopic lithography through shaping ultraviolet laser with digital micro-mirror device

HIGHLIGHTS

  • who: Xiang-Yu Ding and colleagues from the Department of Physics, University of Science and Technology of China, Hefei, China have published the research: Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device, in the Journal: (JOURNAL)
  • what: As a demonstration, the authors here present the ideal of the beam shaping method that will be adopted in the microscopic lithography experiment.
  • how: This paper introduces the laser shaping into maskless projection soft lithography by using DMD error-diffusion algorithm and iterative refinement .

SUMMARY

    Texas Instruments (TI . . .

     

    Logo ScioWire Beta black

    If you want to have access to all the content you need to log in!

    Thanks :)

    If you don't have an account, you can create one here.

     

Scroll to Top

Add A Knowledge Base Question !

+ = Verify Human or Spambot ?